Aluminum nitride nanophotonic circuits operating at ultraviolet wavelengths

M. Stegmaier, J. Ebert, J.M. Meckbach, K. Ilin, M. Siegel and W.H.P. Pernice

Research article (journal)

Abstract

Aluminum nitride (AlN) has recently emerged as a promising material for integrated photonics due to a large bandgap and attractive optical properties. Exploiting the wideband transparency, we demonstrate waveguiding in AlN-on-Insulator circuits from near-infrared to ultraviolet wavelengths using nanophotonic components with dimensions down to 40 nm. By measuring the propagation loss over a wide spectral range, we conclude that both scattering and absorption of AlN-intrinsic defects contribute to strong attenuation at short wavelengths, thus providing guidelines for future improvements in thin-film deposition and circuit fabrication. © 2014 AIP Publishing LLC.

Details zur Publikation

Release year: 2014
Language in which the publication is written: English